Materials & process integration for MEMS /

This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications). MEMS technology and applications have grown at a tremendous pace, whil...

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Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Tay, Francis E. H. (Editor)
Format:	eBook
Language:	English
Published:	New York ; London : Springer, 2002.
Series:	Microsystems (Series) ; v. 9.
Subjects:	Microelectromechanical systems. Micromechanics. Microstructure. Electronic books.
Online Access:	Connect to the full text of this electronic book