Ellipsometry for Industrial Applications /
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. T...
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| Format: | eBook |
| Language: | English |
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Vienna :
Springer Vienna,
1988.
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| Online Access: | Connect to the full text of this electronic book |
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