Ellipsometry for Industrial Applications /

During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. T...

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Bibliographic Details

Main Author:	Riedling, Karl
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Vienna : Springer Vienna, 1988.
Subjects:	Physics. Electronics. Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book