Mechanical Microsensors /

Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and t...

Full description

Bibliographic Details

Main Author:	Elwenspoek, Miko
Corporate Author:	SpringerLink (Online service)
Other Authors:	Wiegerink, Remco
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint : Springer, 2001.
Series:	Microtechnology and MEMS.
Subjects:	Mechanics, Applied. Electronics. Nanotechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book