The Physics of Submicron Lithography /

This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics...

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Bibliographic Details

Main Author:	Valiev, Kamil A.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US : Imprint : Springer, 1992.
Series:	Microdevices, Physics and Fabrication Technologies.
Subjects:	Lithography, Electron beam. X-ray lithography. Ion beam lithography. Physics. Electronic books.
Online Access:	Connect to the full text of this electronic book