Gmelin handbook of inorganic and organometallic chemistry. Si Silicon. Supplement volume B5c, Silicon nitride in microelectronics and solar cells /

Bibliographic Details

Main Author:	Krimmel, E. F. (Author)
Corporate Author:	SpringerLink (Online service)
Other Authors:	Pebler, Alfred (Editor), Schröder, Friedrich (Editor)
Format:	eBook
Language:	English
Published:	Heidelberg : Springer, 1991.
Edition:	8th Edition.
Subjects:	Silicon nitride. Chemistry. Gmelin. Electronic books.
Online Access:	Connect to the full text of this electronic book