Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications /
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputterin...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
1991.
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| Series: | Topics in applied physics ;
64. |
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Angular, energy, and mass distribution of sputtered particles
- Charged and excited states of sputtered atoms
- Surface and depth analysis based on sputtering
- Desorption of organic molecules from solid and liquid surfaces induced by particle impact
- Production of microstructures by ion beam sputtering
- Production of thin films by controlled deposition of sputtered material.