Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications /

Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputterin...

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Bibliographic Details

Main Author:	Behrisch, Rainer
Corporate Author:	SpringerLink (Online service)
Other Authors:	Wittmaack, Klaus
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1991.
Series:	Topics in applied physics ; 64.
Subjects:	Engineering. Particles (Nuclear physics) Physics. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book