APA (7th ed.) Citation

Behrisch, R., & Wittmaack, K. (1991). Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Behrisch, Rainer, and Klaus Wittmaack. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications. Berlin, Heidelberg: Springer Berlin Heidelberg, 1991.

MLA (9th ed.) Citation

Behrisch, Rainer, and Klaus Wittmaack. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications. Springer Berlin Heidelberg, 1991.