High-resolution X-ray scattering from thin films and multilayers /

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...

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Bibliographic Details
Main Author: Holý, Václav, 1953-
Corporate Author: SpringerLink (Online service)
Other Authors: Pietsch, Ullrich, 1952-, Baumbach, Tilo, 1961-
Format: eBook
Language:English
Published: Berlin ; New York : Springer, [1999]
Series:Springer tracts in modern physics ; 149.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Summary:This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.
Item Description:Electronic resource.
Physical Description:1 online resource (xi, 256 pages) : illustrations : digital, HTML and PDF files.
Bibliography:Includes bibliographical references and index.
ISBN:9783540496250 (electronic bk.)
3540496254 (electronic bk.)
ISSN:1615-0430 ;