Low-energy ion irradiation of solid surfaces /
The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[1999]
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| Series: | Springer tracts in modern physics ;
146. |
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Introduction
- Interaction of low-energy ions with solids
- Sputtering of multicomponent materials
- Ionization processes at surfaces
- Ion bombardment of crystalline semiconductors
- Summary.