Low-energy ion irradiation of solid surfaces /

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...

Full description

Bibliographic Details

Main Author:	Gnaser, Hubert, 1953-
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin ; New York : Springer, [1999]
Series:	Springer tracts in modern physics ; 146.
Subjects:	Solids > Effect of radiation on. Ion bombardment. Electronic books.
Online Access:	Connect to the full text of this electronic book