Polycrystalline Silicon Solar Cells Fabricated by Pulsed Rapid Thermal Annealing of Amorphous Silicon /

The PECVD intrinsic, n⁺, and p⁺ a-Si:H thin film deposition processes have been studied by the optical emission spectroscope to monitor the plasma phase chemistry. Process parameters, such as the plasma power, pressure, and gas flow rate, were correlated to SiH*, H[subscript α], and H([subscript β])...

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Bibliographic Details

Main Author:	Lee, I-Syuan (Author)
Other Authors:	Kuo, Yue (Thesis advisor)
Format:	Thesis eBook
Language:	English
Published:	[College Station, Texas] : [Texas A & M University], [2015]
Subjects:	Major Chemical Engineering. optical emission spectroscopy solar cells PIN diodes thin films polycrystalline silicon amorphous silicon
Online Access:	Link to OAK Trust copy