Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
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| Format: | eBook |
| Language: | English |
| Published: |
Cambridge :
Woodhead Publishing Limited,
2014.
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| Series: | Woodhead Publishing series in electronic and optical materials ;
Number 42. |
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource (599 pages) : illustrations. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0857098756 (electronic bk.) 9780857098757 (electronic bk.) |