Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /

Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Feldman, Martin (Editor)
Format:	eBook
Language:	English
Published:	Cambridge : Woodhead Publishing Limited, 2014.
Series:	Woodhead Publishing series in electronic and optical materials ; Number 42.
Subjects:	Nanolithography. Nanophotonics. Nanotechnology. Nanostructured materials > Design and construction. Nanoimprint lithography. Electronic books.
Online Access:	Connect to the full text of this electronic book

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