ebrary, Inc, & Feldman, M. (2014). Nanolithography: The art of fabricating nanoelectronic and nanophotonic devices and systems. Woodhead Publishing Limited.
Chicago Style (17th ed.) Citationebrary, Inc, and Martin Feldman. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems. Cambridge: Woodhead Publishing Limited, 2014.
MLA (9th ed.) Citationebrary, Inc, and Martin Feldman. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems. Woodhead Publishing Limited, 2014.
Warning: These citations may not always be 100% accurate.