Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /

Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion...

Full description

Bibliographic Details

Other Authors:	Nihtianov, Stoyan (Editor), Luque, A. (Antonio) (Editor)
Format:	Book
Language:	English
Published:	Oxford, UK ; Philadelphia : Woodhead Publishing, 2014.
Series:	Woodhead Publishing series in electronic and optical materials ; 51.
Subjects:	Detectors > Industrial applications. Microelectromechanical systems > Industrial applications.