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Sputtering materials for VLSI and thin film devices /

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Bibliographic Details
Main Author: Sarkar, Jaydeep
Corporate Author: ebrary, Inc
Format: eBook
Language:English
Published: Oxford ; Boston : William Andrew Publishing, 2014.
Edition:First edition.
Subjects:
Microelectronics > Materials.
Flat panel displays > Materials.
Sputtering (Physics)
Electronic books.
Online Access:Connect to the full text of this electronic book
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by Sarkar, Jaydeep
Published 2011
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eBook
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