Sputtering materials for VLSI and thin film devices /

Bibliographic Details
Main Author:	Sarkar, Jaydeep
Corporate Author:	ebrary, Inc
Format:	eBook
Language:	English
Published:	Oxford ; Boston : William Andrew Publishing, 2014.
Edition:	First edition.
Subjects:	Microelectronics > Materials. Flat panel displays > Materials. Sputtering (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book

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