Sputtering materials for VLSI and thin film devices /

Bibliographic Details
Main Author:	Sarkar, Jaydeep
Corporate Author:	ebrary, Inc
Format:	eBook
Language:	English
Published:	Oxford ; Boston : William Andrew Publishing, 2014.
Edition:	First edition.
Subjects:	Microelectronics > Materials. Flat panel displays > Materials. Sputtering (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Electronic resource.
Physical Description:	1 online resource (614 pages) : illustrations
Bibliography:	Includes bibliographical references and index.
ISBN:	9780815519874 (e-book)