Electromechanics and MEMS /

"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessa...

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Bibliographic Details

Main Author:	Jones, T. B. (Thomas Byron), 1944-
Corporate Author:	ebrary, Inc
Other Authors:	Nenadic, Nenad G.
Format:	eBook
Language:	English
Published:	Cambridge : Cambridge University Press, 2013.
Subjects:	Microelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book