Atomic layer deposition : principles, characteristics, and nanotechnology applications /

Bibliographic Details

Main Author:	Kääriäinen, Tommi
Corporate Author:	ebrary, Inc
Other Authors:	Cameron, David, 1949-, Kääriäinen, Marja-Leena, Sherman, Arthur, 1931-
Format:	eBook
Language:	English
Published:	Hoboken, New Jersey : John Wiley & Sons, [2013]
Subjects:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book