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Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS /

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Bibliographic Details
Corporate Author: ebrary, Inc
Other Authors: Kanno, Isaku, Kotera, Hidetoshi, Wasa, Kiyotaka
Format: eBook
Language:English
Published: Amsterdam : Elsevier, 2012.
Edition:2nd ed.
Subjects:
Cathode sputtering (Plating process)
Thin films.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • pt. I. Fundamentals of sputtering
  • pt. II. Theory and practice : sputtering deposition of functional thin films
  • pt. III. Sputtering technology for nanomaterials and thin film MEMS.