Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS /

Bibliographic Details

Corporate Author:	ebrary, Inc
Other Authors:	Kanno, Isaku, Kotera, Hidetoshi, Wasa, Kiyotaka
Format:	eBook
Language:	English
Published:	Amsterdam : Elsevier, 2012.
Edition:	2nd ed.
Subjects:	Cathode sputtering (Plating process) Thin films. Electronic books.
Online Access:	Connect to the full text of this electronic book