Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS /
| Corporate Author: | ebrary, Inc |
|---|---|
| Other Authors: | Kanno, Isaku, Kotera, Hidetoshi, Wasa, Kiyotaka |
| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam :
Elsevier,
2012.
|
| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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