ebrary, Inc, Kanno, I., Kotera, H., & Wasa, K. (2012). Handbook of sputter deposition technology: Fundamentals and applications for functional thin films, nanomaterials, and MEMS (2nd ed.). Elsevier.
Chicago Style (17th ed.) Citationebrary, Inc, Isaku Kanno, Hidetoshi Kotera, and Kiyotaka Wasa. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nanomaterials, and MEMS. 2nd ed. Amsterdam: Elsevier, 2012.
MLA (9th ed.) Citationebrary, Inc, et al. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nanomaterials, and MEMS. 2nd ed. Elsevier, 2012.
Warning: These citations may not always be 100% accurate.