Introduction to semiconductor technology /

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...

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Bibliographic Details
Main Author:	Xiao, Hong
Corporate Author:	SPIE (Society)
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Press, 2012.
Edition:	2nd ed.
Subjects:	Semiconductors > Design and construction. Semiconductor industry.

Table of Contents:

Preface to the first edition
Preface to the second edition
Chapter 1. Introduction
Chapter 2. Introduction to integrated circuit fabrication
Chapter 3. Semiconductor basics
Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering
Chapter 5. Thermal processes
Chapter 6. Photolithography
Chapter 7. Plasma basics
Chapter 8. Ion implantation
Chapter 9. Etch
Chapter 10. Chemical vapor deposition and dielectric thin films
Chapter 11. Metallization
Chapter 12. Chemical mechanical polishing
Chapter 13. Process integration
Chapter 14. Integrated circuit processing technologies
Chapter 15. Future trends and summary
Index.