Introduction to semiconductor technology /
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...
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Bibliographic Details
| Main Author: |
Xiao, Hong |
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| Corporate Author: |
SPIE (Society) |
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| Format: | Book
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| Language: | English |
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| Published: |
Bellingham, Wash. :
SPIE Press,
2012.
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| Edition: | 2nd ed. |
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| Subjects: | |
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