Introduction to semiconductor technology /
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE Press,
2012.
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| Edition: | 2nd ed. |
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| Summary: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations. |
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| Physical Description: | xxx, 664 pages : illustrations ; 26 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780819490926 081949092X |