Nanofabrication using focused ion and electron beams : principles and applications /

Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Utke, Ivo, Moshkalev, Stanislav, Russell, Phillip, 1955-
Format:	eBook
Language:	English
Published:	Oxford ; New York : Oxford University Press, 2011.
Series:	Nanomanufacturing series ; v. 1
Subjects:	Nanostructured materials. Nanotechnology. Electron beams > Industrial applications. Ion bombardment > Industrial applications. Electronic books.
Online Access:	Connect to the full text of this electronic book

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