Optical scattering : measurement and analysis /

The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and partic...

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Bibliographic Details

Main Author:	Stover, John C.
Corporate Author:	SPIE (Society)
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Press, [2012]
Edition:	3rd ed.
Subjects:	Light > Scattering.