Surface analysis of reactive ion etched PZT thin films in SF6 plasma /

Bibliographic Details
Main Author:	Zakar, Eugene
Corporate Author:	U.S. Army Research Laboratory
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2007]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 4284.
Subjects:	Surfaces (Technology) > Analysis. Thin films. Piezoelectricity.
Online Access:	https://purl.fdlp.gov/GPO/gpo19262

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