Atomic layer deposition of nanostructured materials /

Bibliographic Details

Other Authors:	Knez, Mato, Pinna, Nicola
Format:	eBook
Language:	English
Published:	Weinheim : Wiley-VCH, 2011.
Series:	Wiley online library.
Subjects:	Chemical vapor deposition. Nanostructured materials. Electronic books.
Online Access:	Connect to the full text of this electronic book