Digital holography for MEMS and microsystem metrology /

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...

Full description

Bibliographic Details

Other Authors:	Asundi, Anand
Format:	eBook
Language:	English
Published:	Chichester : Wiley, [2011]
Series:	Wiley Online Library. Wiley microsystem and nanotechnology series.
Subjects:	Holographic testing. Microelectromechanical systems > Measurement. Microelectronics > Measurement. Electronic books.
Online Access:	Connect to the full text of this electronic book