Industrial micro & nano fabrication /

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...

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Bibliographic Details

Main Author:	Luttge, Regina
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Norwich, N.Y. : William Andrew ; 2010.
Series:	Micro and nano technologies series
Subjects:	Microfabrication. Nanotechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book