Advances in CMP/polishing technologies for the manufacture of electronic devices /
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This title presents the developments and technological innovations in the field - making R&D accessible to the wider engineering community.
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Oxford :
William Andrew,
2012.
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| Edition: | 1st ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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