Design of a plasma abatement system for perfluoronated compounds /

Bibliographic Details

Main Author:	Butler, Matthew
Other Authors:	O'Neal, Dennis L. (Thesis advisor)
Format:	Thesis eBook
Language:	English
Published:	[College Station, Tex.] : [Texas A&M University], [2011]
Subjects:	Major mechanical engineering. CF4 abatement C4F8 semiconductor Plasma
Online Access:	Link to OAK Trust copy