Cover Image

Silicon carbide microsystems for harsh environments /

Bibliographic Details
Main Author: Wijesundara, Muthu B. J.
Corporate Author: SpringerLink (Online service)
Other Authors: Azevedo, Robert G.
Format: eBook
Language:English
Published: New York : Springer, [2011]
Series:MEMS reference shelf.
Subjects:
Microelectromechanical systems.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource.
Bibliography:Includes bibliographical references and index.
ISBN:1441971211 (electronic bk.)
9781441971210 (electronic bk.)
DOI:10.1007/978-1-4419-7121-0