Silicon carbide microsystems for harsh environments /

Bibliographic Details

Main Author:	Wijesundara, Muthu B. J.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Azevedo, Robert G.
Format:	eBook
Language:	English
Published:	New York : Springer, [2011]
Series:	MEMS reference shelf.
Subjects:	Microelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book