Introduction to microsystem design /

Bibliographic Details
Main Author:	Schomburg, Werner Karl
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin ; Heidelberg : Springer, [2011]
Series:	RWTH edition.
Subjects:	Microelectromechanical systems > Design and construction. Electronic books.
Online Access:	Connect to the full text of this electronic book

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