Capacitance cell measurement of the out-of-plane expansion of thin films /

Bibliographic Details
Main Author:	Snyder, Chad R.
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Mopsik, Frederick I.
Format:	Government Document eBook
Language:	English
Published:	[Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2001]
Series:	NIST recommended practice guide. NIST special publication ; no. 960-7.
Subjects:	Thin-film circuits. Thin films > Thermal properties. Expansion (Heat) > Measurement.
Online Access:	https://purl.fdlp.gov/GPO/gpo6356

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