Cover Image

Design and manufacturing of active microsystems /

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Burisch, Arne, Büttgenbach, S. (Stephanus), 1945-, Hesselbach, Jürgen
Format: eBook
Language:English
Published: Berlin ; Heidelberg ; New York : Springer, [2011]
Series:Microtechnology and MEMS.
Subjects:
Microtechnology.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource.
Bibliography:Includes bibliographical references and index.
ISBN:364212903X (electronic bk.)
9783642129032 (electronic bk.)
DOI:10.1007/978-3-642-12903-2