Design and manufacturing of active microsystems /

Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Burisch, Arne, Büttgenbach, S. (Stephanus), 1945-, Hesselbach, Jürgen
Format:	eBook
Language:	English
Published:	Berlin ; Heidelberg ; New York : Springer, [2011]
Series:	Microtechnology and MEMS.
Subjects:	Microtechnology. Electronic books.
Online Access:	Connect to the full text of this electronic book