Cover Image

Comparison of gold/platinum and gold/ruthenium contacts on piezoelectrically actuated RF MEMS switches /

Bibliographic Details
Corporate Author: U.S. Army Research Laboratory
Other Authors: Proie, Robert
Format: Government Document eBook
Language:English
Published: Adelphi, MD : Army Research Laboratory, [2010]
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 5218.
Subjects:
Radio frequency microelectromechanical systems.
Piezoelectricity.
Metallurgy.
Online Access:https://purl.fdlp.gov/GPO/gpo12982
Description
Item Description:Title from title screen (viewed on Sept. 21, 2011).
"June 2010."
Electronic resource.
Physical Description:1 online resource (iv, 12 pages) : color illustrations
Bibliography:Includes bibliographical references (page 9).