Comparison of gold/platinum and gold/ruthenium contacts on piezoelectrically actuated RF MEMS switches /

Bibliographic Details

Corporate Author:	U.S. Army Research Laboratory
Other Authors:	Proie, Robert
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2010]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 5218.
Subjects:	Radio frequency microelectromechanical systems. Piezoelectricity. Metallurgy.
Online Access:	https://purl.fdlp.gov/GPO/gpo12982