A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films /

Bibliographic Details

Main Author:	Polcawich, Ronald G.
Corporate Author:	U.S. Army Research Laboratory
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2004]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 3387.
Subjects:	Microelectromechanical systems. Microphone.
Online Access:	https://purl.fdlp.gov/GPO/LPS125007