MEMs reliability /

Bibliographic Details
Main Author:	Hartzell, Allyson L.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Da Silva, Mark G., Shea, Herbert R.
Format:	eBook
Language:	English
Published:	New York ; London : Springer, 2011.
Series:	MEMS reference shelf.
Subjects:	Microelectromechanical systems > Reliability. Electronic books.
Online Access:	Connect to the full text of this electronic book

Available Online