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Handbook of chemicals and gases for the semiconductor industry /

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The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. The Handbook of Chemicals and Gases for the Semiconductor Industry is a convenient source of information on the properties, appli...

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Bibliographic Details
Main Author: Miśra, Āśutosha, 1970-
Other Authors: Hogan, Jeremiah D., Chorush, Russell
Format: eBook
Language:English
Published: New York : Wiley-VCH, [2002]
Series:Wiley online library.
Subjects:
Chemicals > Handbooks, manuals, etc.
Semiconductors > Materials > Handbooks, manuals, etc.
Electronic reference sources.
Electronic books.
Databases.
Online Access:http://proxy.library.tamu.edu/login?url=http://coral.library.tamu.edu/resourcelink.php?resource=2076

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Holdings details from Available Online
Call Number: TP201 .M57 2002
 
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TP201 .M57 2002 Available