Dynamics of microelectromechanical systems /

Bibliographic Details

Main Author:	Lobontiu, Nicolae
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	New York : Springer, [2007]
Series:	Microsystems (Series) ; v. 17.
Subjects:	Microelectromechanical systems. Microstructure. Electronic books.
Online Access:	Connect to the full text of this electronic book