Cover Image

Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics : Symposium held April 5-9, 2010, San Francisco, California /

Bibliographic Details
Corporate Authors: Symposium E, "Chemical Mechanical Planarization as a Semiconductor Technology Enabler" San Francisco, Calif., Materials Research Society. Fall Meeting
Other Authors: Bartha, Johann W.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2010]
Series:Materials Research Society symposia proceedings ; v. 1249.
Subjects:
Chemical mechanical planarization > Congresses.
Microelectronics > Congresses.
Nanoelectronics > Congresses.
Description
Item Description:"Symposium E, 'Chemical Mechanical Planarization as a Semiconductor Technology Enabler--2010,' held April 5-9 at the 2010 MRS Spring Meeting in San Francisco, California ..."--Pref.
Physical Description:xiv, 342 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1605112267
9781605112268